On Tuesday, 13.11.2025, from 11:30 to 13:00, we will host a technical demonstration of the Keyence VKX-3000 3D laser scanning microscope at the DESY Innovation Factory.
The instrument enables:
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non-contact 3D measurement of samples with laser resolution down to 0.1 nm
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focus variation for fast measurements over areas up to 50 mm
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white light interferometer mode for large-area measurements in the sub-nm range
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roughness measurements (line/area) according to ISO standards
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profile, step and layer thickness measurements (non-destructive)
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high-contrast, SEM-like images with extended depth of field and easy 1-click operation
We would be very happy if you could join the session. Please feel free to bring your own real samples/parts; the Keyence specialist will carry out 3D measurements and depth-of-field imaging according to your needs and will provide the corresponding images and measurement reports.

